50X NUV Plan APO Objective
Infinity 95MM (Plan NUV APO) f′=200mm(Tube lens) Wave Range: 350nm-700nm
This set NUV objective is with wave from 360nm to 700nm, specifically for lase light 365nm spot, only supplier in maskless lithography in China. The objective is with high transmittance rate and sharp image, Widely for using in chip field and so on.